| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize a device, to instantly vaporize a jetted liquid raw material and fuel, to stabilize vapor temp. against the load change and to improve durability by thermal stress relaxation. SOLUTION: A vaporizer 21 is provided with a vaporization chamber 50 for generating the vapor of the raw material and fuel by vaporizing the liquid raw material and fuel by a combustion gas generated in a combustor, a heating chamber 60 for heating the generated vapor of the raw material and fuel by the combustion gas discharged from the combustion chamber 50 and a guide passage 70 for sending the combustion gas discharged from the vaporization chamber 50 along the floor surface 50A of the vaporization chamber 50 to the heating chamber 60. In the heating chamber 60, the vapor of the raw material and fuel generated in the vaporization chamber 50, passing through a vapor tube 61 is heated under uniform temp. atmosphere by the combustion gas discharged from a heating medium tube 51. |
