发明名称 Method of making floating-gate memory-cell array with digital logic transistors
摘要 A nonvolatile memory array is encased in a P-well, and the P-well encased in a deep N-well, the two wells separating the memory array from the integrated circuit substrate and from the other circuitry of the integrated circuit. At the same time the deep N-well is formed for the nonvolatile memory array, deep N-wells are formed for the high-voltage P-channel transistors of the logic circuitry. At the same time the P-well is formed for the nonvolatile memory array, P-wells are formed for the low-voltage N-channel transistors. The memory array contains nonvolatile cells of the type used in ultra-violet-erasable EPROMs. During erasure, the isolated-well formation allows the source, the drain and the channel of selected cells to be driven to a positive voltage. The isolated well is also driven to a positive voltage equal to, or slightly greater than, the positive voltage applied to the source and drain, thus eliminating the field-plate breakdown-voltage problem.
申请公布号 US6475846(B1) 申请公布日期 2002.11.05
申请号 US19950444182 申请日期 1995.05.18
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 MAROTTA GIULIO;SANTIN GIOVANNI;SMAYLING MICHAEL C.;MATSUOKA MISAKO A.;FUKAWA SATORU
分类号 H01L21/8247;H01L27/105;(IPC1-7):H01L21/823 主分类号 H01L21/8247
代理机构 代理人
主权项
地址