LASER BEAM PROCESSING METHOD, BEARING DEVICE, SPINDLE MOTOR, AND DISK DRIVE UNIT

摘要

PROBLEM TO BE SOLVED: To provide a laser beam processing technology capable of preventing pollution on the surface of a workpiece with fume by suppressing diffusion of the fume in the vicinity of the surface of the workpiece.

SOLUTION: The workpiece 6 is set to a tool 7, and a nitrogen gas flow directed to a working point 61 from the periphery of the working point 61 on the workpiece 6 is formed. By increasing a pressure in a space SP1 interposed between the working point 61 and a laser beam passing hole 71a to be higher than a pressure in a space SP2 extending oppositely to the workpiece 6 with respect to the laser beam passing hole 71a, a nitrogen gas flow directed from the space SP1 to the space SP2 via the laser beam passing aperture 71a is formed. Fume produced from the working point 61 is not diffused in the vicinity of the surface of the workpiece 6, but discharged to the space SP2 together with an inert gas through the laser beam passing hole 71a. Thus, pollution of the surface of the workpiece 6 caused by the fume can be prevented.

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