| 摘要 |
This invention provides a technique for producing an organic EL display device having a prolonged service life. The production process comprises placing a first protective film (15) for protecting a luminescent part (12) in a vacuum atmosphere, introducing trimethylaluminum and ozone alternately to form an alumina thin film on the surface of the first protective film (15). This alumina thin film is dense and is impermeable to water. Therefore, moisture in the air does not reach the luminescent part (12) and thus does not cause a deterioration in the organic thin film in the luminescent part (12), and, thus, an organic EL display device (5) having a prolonged service life can be provided. |
