| 摘要 |
PROBLEM TO BE SOLVED: To obtain an appearance inspection device that can suppress inspection accuracy from falling due to a deviation of an inspection object.SOLUTION: An appearance inspection device 1 according to an embodiment comprises: a first imaging device 31 that sequentially photographs linear light L1 provided in an inspection object 100, formed in a first inspection object face 101 crossing a first direction and extending along a second direction crossing the second direction, in which an irradiation position in the inspection object face 101 moves along a third direction crossing the first direction and the second direction; an image data generation unit that generates first image data representing a three-dimensional shape of the inspection object face 101, using imaging data on the light L1 photographed by the first imaging device 31; a deviation-amount data acquisition unit that acquires first deviation-amount data representing an amount of deviation of the inspection object 100 with respect to a reference; and a correction unit that corrects the first image data using the first deviation-amount data.SELECTED DRAWING: Figure 1 |
