| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer or the like that achieves increase in speed of reciprocation of a moving mirror, suppresses increase in the maximum instantaneous thrust required for inversion, and also can keep the speed stability of the moving mirror.SOLUTION: The interferometer includes: a moving mirror 8; a movement mechanism 9 for reciprocating the moving mirror; a movement control unit 11 that controls the movement mechanism and makes the speed of the reciprocation of the moving mirror constant; and a measurement unit 10 for measuring the position of the moving mirror. The movement control unit receives target position data indicating a target position of the moving mirror, and controls the movement mechanism so that the measurement position of the moving mirror measured by the measurement unit is made to approach the target position indicated by the target position data. The time change waveform of the target position indicated by the target position data is set so as to have a trapezoidal wave obtained by horizontally cutting the apex part of a triangular wave or a shape obtained by smoothly changing the corner part of the trapezoidal wave.SELECTED DRAWING: Figure 2 |
