| 摘要 |
A technique capable of realizing a semiconductor gas sensor having a high rising response speed is provided. A gate insulating film (e.g., a SiO2 film) is formed on a Si layer, and a modified TiOx (a TiOx nanocrystal) film is formed on the gate insulating film. Further, on the modified TiOx film, a Pt film is formed. This Pt film is composed of a plurality of Pt crystal grains, and in a crystal grain boundary gap existing among the plurality of Pt crystal grains, Ti and oxygen (O) are present, and particularly, a TiOx nanocrystal is formed on a surface in the vicinity of a grain boundary triple point as the center. |
