发明名称 |
Sensor structure and yaw rate sensor |
摘要 |
A sensor structure includes a substrate having a main extension plane, a first seismic mass and a second seismic mass, the first and the second seismic masses being deflectable relative to the substrate along a direction of deflection essentially perpendicular to the main extension plane. The first and second seismic masses are coupled together via a rigid coupling rocker pivotable around a rocker axis parallel to the main extension plane. The first seismic mass is suspended from the substrate with the aid of a first suspension spring, and an essentially rigid first coupling bar is situated between the first suspension spring and the first seismic mass. |
申请公布号 |
US9453927(B2) |
申请公布日期 |
2016.09.27 |
申请号 |
US201213729709 |
申请日期 |
2012.12.28 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
Heitz Markus;Gauger Christoph;Gracki Sebastian;Wellner Patrick |
分类号 |
G01V1/18;G01C19/5747 |
主分类号 |
G01V1/18 |
代理机构 |
Norton Rose Fulbright US LLP |
代理人 |
Norton Rose Fulbright US LLP |
主权项 |
1. A sensor structure, comprising:
a substrate having a main extension plane; a first seismic mass and a second seismic mass, wherein the first seismic mass and the second seismic mass are deflectable relative to the substrate along a direction of deflection essentially perpendicular to the main extension plane of the substrate; a rigid coupling rocker which couples together the first seismic mass and the second seismic mass, wherein the rigid coupling rocker is pivotable around a rocker axis parallel to the main extension plane of the substrate; a first suspension spring, wherein the first seismic mass is suspended from the substrate with the aid of the first suspension spring; and an essentially rigid first coupling bar connected to the first suspension spring and the first seismic mass, wherein a first end section of the first coupling bar is attached directly to the first seismic mass. |
地址 |
Stuttgart DE |