| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of suppressing exfoliation of the interface between a piezoelectric layer and an electrode layer.SOLUTION: A piezoelectric element includes a substrate, a lower electrode provided above the substrate, a lower adhesion layer provided on the upper surface of the lower electrode, a piezoelectric layer which contains a piezoelectric material and is provided on the upper surface of the lower adhesion layer, and an upper electrode provided above the piezoelectric layer. The lower adhesion layer has a first electrode material portion containing the electrode material of the lower electrode, and a first piezoelectric material portion containing a piezoelectric material, and the first electrode material portion and the first piezoelectric material portion are intricate in the lower adhesion layer.SELECTED DRAWING: Figure 2 |
