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发明名称
SEMICONDUCTOR DEVICE HAVING A BUILT-IN CAPACITOR AND MANUFACTURING METHOD THEREOF
摘要
申请公布号
EP0361900(A3)
申请公布日期
1990.09.12
申请号
EP19890309843
申请日期
1989.09.27
申请人
FUJITSU LIMITED
发明人
KAWAI, TAKAHISA
分类号
H01L27/04;H01L21/02;H01L21/70;H01L21/822;H01L21/8252;(IPC1-7):H01L29/92
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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