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发明名称	THIN FILM FORMING DEVICE
摘要
申请公布号	JPH059717(A)	申请公布日期	1993.01.19
申请号	JP19910165639	申请日期	1991.07.05
申请人	RICOH CO LTD	发明人	SATO TATSUYA;OTA WASABURO
分类号	C23C14/32	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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