GAS DISCHARGER FOR DRYING PROCESS APPARATUS,申请号JP19920192208-传众专利搜索

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发明名称	GAS DISCHARGER FOR DRYING PROCESS APPARATUS
摘要
申请公布号	JPH0637043(A)	申请公布日期	1994.02.10
申请号	JP19920192208	申请日期	1992.07.20
申请人	OKI ELECTRIC IND CO LTD	发明人	KANAMORI JUN
分类号	H01L21/302;H01L21/3065;(IPC1-7):H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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