| 摘要 |
PURPOSE:To obtain an ink-jet head enabling high speed recording by an inexpensive constitution, by providing an air holding chamber possessing an air producing heating resistor and having a gas-liquid interface to absorb a pressure change in a common liquid chamber part in the rear of a nozzle. CONSTITUTION:A heating resistor 112 is formed on a board, Ti and Al are metallized continuously, a heat acting part 111 is made by preparing a pattern and at the same time, the heating resistor 112 is manufactured on a part becoming an air holding chamber 208. Then SiO2, Ta2O5 and Ta are accumulated continuously, which are made into a protective film by performing patterning, a dry film is laminated and a nozzle 201, a part of a common liquid chamber 204 and an air holding chamber 208 becoming a gas-liquid interface are manufactured by a photolithographic process. The air holding chamber 208 is arranged on a position corresponding to a common liquid chamber 204 on the rear of a nozzle 201. Then a dry film is laminated to glass having an engraved part becoming a part of the common liquid chamber 204 and a through hole becoming an ink supply port and patterning is performed. |
