发明名称 Micro-processing apparatus and method therefor
摘要 A micro-working apparatus performs fabrication and assembly tasks for micron/nanometer sized objects while progress of operations is observed in real-time by at least a pair of optical or electron microscopes to provide simultaneous views from at least two directions. This offers spatial visual information regarding the working space which is particularly critical in micro-working. Micro-working is further facilitated by the use of a micro-pallet device specially designed for use in the apparatus, but also offering other application possibilities. Rotational and parallel translation movements provided by the micro-pallet combined with the micro-working capability of the apparatus are utilized to enable production of micron-sized parts for use in advanced applications of optical and electronic devices.
申请公布号 US5852298(A) 申请公布日期 1998.12.22
申请号 US19960621990 申请日期 1996.03.26
申请人 EBARA CORPORATION;HATAMURA, YOTARO 发明人 HATAKEYAMA, MASAHIRO;ICHIKI, KATSUNORI;KATO, TAKAO;KAJIYAMA, MASAAKI;TSUZUKI, TAKASHI;HATAMURA, YOTARO;NAKAO, MASAYUKI
分类号 H01J37/20;H01J37/30;(IPC1-7):H01J37/00 主分类号 H01J37/20
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