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发明名称
MITTEL ZUR KONTROLLE DER TARGETABTRAGUNG UND DER ZERSTÄUBUNG IN EINEM MAGNETRON
摘要
申请公布号
DE69928790(T2)
申请公布日期
2006.08.31
申请号
DE19996028790T
申请日期
1999.04.14
申请人
BEKAERT ADVANCED COATINGS N.V.
发明人
DE BOSSCHER, WILMERT;LIEVENS, HUGO
分类号
C23C14/35;H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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