| 摘要 |
<p>A treatment apparatus for liquid treatment of a treatment object by bringing a liquid into contact with the treatment object. It is intended to solve the problems of when the treatment apparatus conducts a liquid treatment over a given region on the treatment object, adhering of misty liquid to the treatment object and consumption of a large volume of liquid in the liquid treatment. The treatment apparatus comprises supply means (60,61,62,R60,R61,R62) for liquid supply; treatment object treating means (3,R3) for not only bringing the liquid supplied by the supply means (60,61,62,R60,R61,R62) into contact with treatment object (W,W') but also, while preventing the diffusion of the liquid, treating the treatment object (W,W'); recovery means (70,71,72,R70,R71,R72) for recovering the liquid supplied to the treatment object treating means (3,R3); and holding means (4,R4) for holding the treatment object treating means (3,R3) apart from contact with the treatment object (W,W').</p> |
