发明名称 |
DEVICE AND METHOD TO CREATE A LOW DIVERGENCE, HIGH POWER LASER BEAM FOR MATERIAL PROCESSING APPLICATIONS |
摘要 |
A thin beam laser crystallization apparatus for selectively melting a film deposited on a substrate is disclosed having a laser source producing a pulsed laser output beam, the source having an oscillator comprising a convex reflector and a piano output coupler; and an optical arrangement focusing the beam in a first axis and spatially expanding the beam in a second axis to produce a line beam for interaction with the film. |
申请公布号 |
WO2007143144(A9) |
申请公布日期 |
2008.02.07 |
申请号 |
WO2007US13029 |
申请日期 |
2007.05.31 |
申请人 |
CYMER, INC.;HOFMANN, THOMAS |
发明人 |
HOFMANN, THOMAS |
分类号 |
B23K26/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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