发明名称 SHEET PASTING DEVICE AND PASTING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a sheet pasting device capable of forming notched parts through the use of a sheet which has a simple layer structure, where notched parts are intermittently formed in the sheet and only an adhesive layer is arranged on one surface, and pasting a protection sheet formed inside the notched parts to an attachment body, and to provide a pasting method. <P>SOLUTION: The sheet pasting device forms the intermittent notched parts C along a substantially loop shape locus in the middle of feeding the belt shape sheet S with the adhesive layer A arranged on one surface, and adopts an inner region enclosed with the notched parts C as the pasting sheet S1, and pastes the sheet to the attachment body such as a wafer W. The pasting sheet S1 is pasted from one end side of the wafer W to the other end side with the use of a pressure roller 30. An unnecessary part S2 at the outer side is separated and simultaneously collected by a collecting means. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008098278(A) 申请公布日期 2008.04.24
申请号 JP20060276310 申请日期 2006.10.10
申请人 LINTEC CORP 发明人 YOSHIOKA TAKAHISA;SUGISHITA YOSHIAKI
分类号 H01L21/683 主分类号 H01L21/683
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