Vacuum continuous line to process substrates

摘要

A continuously operated vacuum wafer-coating assembly has air locks to a process chamber via an inlet and an outlet. The chamber has a conveyer for (11) a plasma boat holding the stacked wafers. The wafers are stacked equally spaced in the same plane on an electrically conducting rack (32) with a base plate (30) and subject to alternating current. The wafers are stacked either horizontally in the plasma boat in one or more levels. The wafers are 1 m x 0.2 m and are separated by a gap of 3-20 mm. One or more plasma boats pass through the chamber at the same time and linked together in series. The plasma boat has runners or rollers and may a transverse and/or longitudinal passage through the chamber.