| 发明名称 |
HIGH VOLTAGE CHUCK FOR A PROBE STATION |
| 摘要 |
A chuck for testing an integrated circuit includes an upper conductive layer having a lower surface and an upper surface suitable to support a device under test. An upper insulating layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper conductive layer, and a lower surface. A middle conductive layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper insulating layer, and a lower surface. |
| 申请公布号 |
US2016195579(A1) |
申请公布日期 |
2016.07.07 |
| 申请号 |
US201615072170 |
申请日期 |
2016.03.16 |
| 申请人 |
Cascade Microtech, Inc. |
发明人 |
Simmons Michael E.;Negishi Kazuki;Garrison Ryan;Wolf Philip |
| 分类号 |
G01R31/26;H01L21/683 |
主分类号 |
G01R31/26 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A chuck comprising:
(a) an upper conductive layer having a lower surface and an upper surface suitable to contact and support a device under test, wherein said upper surface of said upper conductive layer includes thereon a vacuum distribution for holding said device under test; (b) an upper insulating layer having an upper surface at least in partial face-to-face contact with said lower surface of said upper conductive layer, and a lower surface, wherein the upper insulating layer is horizontally distinct from the upper conductive layer; and (c) a middle conductive layer having an upper surface at least in partial face-to-face contact with said lower surface of said upper insulating layer, and a lower surface, wherein the middle conductive layer is horizontally distinct from the upper insulating layer. |
| 地址 |
Beaverton OR US |
