| 发明名称 |
ELECTRONIC DEVICE, METHOD OF MANUFACTURING ELECTRONIC DEVICE, PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS AND MOVING OBJECT |
| 摘要 |
A physical quantity sensor includes a first sensor element, an outer edge portion arranged on at least a portion of the outer periphery of the first sensor element, in which a first groove portion extending in a first direction is provided on the outer edge portion when the outer edge portion is seen in plan view. |
| 申请公布号 |
US2016195567(A1) |
申请公布日期 |
2016.07.07 |
| 申请号 |
US201614987186 |
申请日期 |
2016.01.04 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
TANAKA Satoru |
| 分类号 |
G01P15/125;B81C1/00;G01P15/08 |
主分类号 |
G01P15/125 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An electronic device, comprising:
a first functional element; and an outer edge portion arranged on at least a portion of the outer periphery of the first functional element, wherein a first groove portion in which grooves are arranged extending in a first direction or lined up along the first direction is provided on the outer edge portion when the outer edge portion is seen in plan view. |
| 地址 |
Tokyo JP |
