METHOD FOR CONSTANT CONCENTRATION EVAPORATION AND DEVICE USING THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a bubbler where temperature and pressure variations are minimized so that product quality is stabilized in a CVD process.SOLUTION: A heat exchanger 300 is in fluid communication with an evaporator 100; the evaporator comprises an outer casing 102 and an inner casing 110; the inner casing contacts a plate 200; the inner casing encloses a first conduit 210 and a second conduit 214; the first conduit introduce a carrier fluid into the evaporator; the second conduit takes out the carrier fluid entrained with a precursor; the outer casing is detachably attached to the plate; the plate contacts a first precursor conduit 306 that introduces the precursor into the evaporator from the heat exchanger; and the heat exchanger is disposed proximate to evaporator at a distance effective to maintain the precursor in the evaporator at a constant temperature when ambient temperature around the heat exchanger and evaporator fluctuates by an amount within about ±35°C inclusive.SELECTED DRAWING: Figure 2