| 摘要 |
This support frame (1) has a frame body (10) that is formed of an aluminum alloy. A pellicle film (2) is bonded to a front surface (10a) of the frame body (10), and a transparent substrate (M) is bonded to a back surface (10b) of the frame body (10). The height of the frame body (10) in the front-back direction is from 1 mm to 6 mm (inclusive). Recessed grooves (20, 30) are formed in the front surface (10a) and the back surface (10b) of the frame body (10), and the recessed grooves (20, 30) are formed to have a depth of 0.2 mm or more. Due to this configuration, the support frame (1) is easily processed, and deformation of the transparent substrate (M) at the time of bonding of the support frame (1) to the transparent substrate (M) is able to be prevented. |
