Inspection device and inspection method

摘要

Provided are an inspection device and an inspection method capable of achieving improved magnetic field sensitivity by using a magnetic thin film of a small film thickness. A light-emitting unit 1 emits light of a first wavelength for acquiring magnetic field inspection information and a second wavelength for acquiring inspection object surface information. A selection unit 6 selects information from an inspection object 4 and information from a magnetophotonic crystal film 3 acquired by light irradiation performed by an irradiation unit 2. An image generation unit 9 generates image data based on the magnetic field inspection information acquired with the first wavelength and the inspection object surface information acquired with the second wavelength selected by the selection unit. Each of the generated image data is displayed on a display unit 10.

主权项

1. An inspection device for evaluating characteristic changes in an inspection object such as flaws and material property changes by using magnetism, the inspection device comprising:
a magnetophotonic crystal film, wherein the magnetic photonic magnetophotonic crystal film is a film-shaped magnetic field detection element arranged immediately above an inspection object surface of the inspection object in order to detect a magnetic field generated by an excitation unit, and the inspection device comprises: a light-emitting unit configured to emit light of a first wavelength that acquires magnetic field inspection information by reflecting light inside of the magnetophotonic crystal and a second wavelength that acquires inspection object surface information by passing light through the magnetophotonic crystal, wherein said magnetophotonic crystal film is sandwiched between two dielectric mirrors such that multiple reflections are produced between the dielectric mirrors; a selection unit which selects information from the inspection object and information from the magnetophotonic crystal film acquired by the light irradiation by the irradiation unit as the inspection object surface information and the magnetic field inspection information; an image generation unit which generates image data based on the magnetic field inspection information acquired with the first wavelength and the inspection object surface information acquired with the second wavelength selected by the selection unit; and a display unit which displays the image data generated by the image generation unit.