发明名称 METHOD FOR PRODUCING CATALYST-FREE SINGLE CRYSTAL SILICON NANOWIRES, NANOWIRES PRODUCED BY THE METHOD AND NANODEVICE COMPRISING THE NANOWIRES
摘要 Disclosed herein is a method for producing catalyst-free single crystal silicon nanowires. According to the method, nanowires can be produced in a simple and economical manner without the use of any metal catalyst. In addition, impurities contained in a metal catalyst can be prevented from being introduced into the nanowires, contributing to an improvement in the electrical and optical properties of the nanowires. Also disclosed herein are nanowires produced by the method and nanodevice comprising the nanowires.
申请公布号 US2009152527(A1) 申请公布日期 2009.06.18
申请号 US20080128362 申请日期 2008.05.28
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE EUN KYUNG;WHANG DONGMOK;CHOI BYOUNG LYONG;KIM BYUNG SUNG
分类号 H01L21/20;H01L29/66 主分类号 H01L21/20
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