| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing pad which is capable of preventing the end surface of the fiber layer from being loosened during the polishing and of preventing a defective polishing from occurring, which is simply formed and has a high shape accuracy, and on which burrs are not produced, and also provide a method of machining the shape of the polishing pad. <P>SOLUTION: This laminated polishing pad comprises a fiber layer basically formed of a polymeric material and substantially formed of only fibers and a resin layer. The fiber end surface of the fiber layer is locally heated to a high temperature state so that the fiber layer can be melt-cut or melt-treated. <P>COPYRIGHT: (C)2010,JPO&INPIT |
