发明名称 |
FILM-FORMING MASK, FILM-FORMING DEVICE, AND FILM-FORMING METHOD |
摘要 |
A mask (11) comprising a mask substrate (12) having a protruding section (19) in an opening end surface (16) of an opening (14), having an acute angle defined by θ1 and θ2 of no more than 43°, and having a height from a film-formation surface (200a) on the substrate (200) to a tip section (19a) of the protruding section (19) of at least the thickness of the film to be formed on the film-formation surface (200a). |
申请公布号 |
WO2016121652(A1) |
申请公布日期 |
2016.08.04 |
申请号 |
WO2016JP51881 |
申请日期 |
2016.01.22 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
OKAMOTO, TETSUYA;HIRASE, TAKESHI;SENOO, TOHRU;SONODA, TOHRU;NISHIKAWA, DAICHI;ISHIDA, MAMORU |
分类号 |
C23C16/04;C23C14/04;H01L51/50;H05B33/04;H05B33/10 |
主分类号 |
C23C16/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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