发明名称 FILM-FORMING MASK, FILM-FORMING DEVICE, AND FILM-FORMING METHOD
摘要 A mask (11) comprising a mask substrate (12) having a protruding section (19) in an opening end surface (16) of an opening (14), having an acute angle defined by θ1 and θ2 of no more than 43°, and having a height from a film-formation surface (200a) on the substrate (200) to a tip section (19a) of the protruding section (19) of at least the thickness of the film to be formed on the film-formation surface (200a).
申请公布号 WO2016121652(A1) 申请公布日期 2016.08.04
申请号 WO2016JP51881 申请日期 2016.01.22
申请人 SHARP KABUSHIKI KAISHA 发明人 OKAMOTO, TETSUYA;HIRASE, TAKESHI;SENOO, TOHRU;SONODA, TOHRU;NISHIKAWA, DAICHI;ISHIDA, MAMORU
分类号 C23C16/04;C23C14/04;H01L51/50;H05B33/04;H05B33/10 主分类号 C23C16/04
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