METHOD FOR PRODUCING OXIDE PROTECTIVE FILM, OXIDE PROTECTIVE FILM, METHOD FOR MANUFACTURING THIN FILM TRANSISTOR, THIN FILM TRANSISTOR AND ELECTRONIC DEVICE

摘要

A method for producing an oxide protective film, which comprises: a step for forming an oxide protective film precursor film by applying an oxide protective film precursor solution that contains a solvent and a metal component comprising 50 atom% or more of indium over an oxide semiconductor film that is formed on a substrate and contains indium; and a step for converting the oxide protective film precursor film into an oxide protective film that has a higher resistivity than the oxide semiconductor film; and applications of this method for producing an oxide protective film.