发明名称 |
Test circuit and semiconductor apparatus including the same |
摘要 |
A test circuit includes a through via test unit configured to be set to a first resistance value in response to a first test control signal and to a second resistance value in response to the first test control signal and a second test control signal, and form a current path including a through via that electrically connects a first chip and a second chip; and a test measurement unit configured to supply a test voltage to the through via and measure a current flowing through the through via. |
申请公布号 |
US9465058(B2) |
申请公布日期 |
2016.10.11 |
申请号 |
US201514867188 |
申请日期 |
2015.09.28 |
申请人 |
SK HYNIX INC. |
发明人 |
Lee Dong Uk;Kim Young Ju |
分类号 |
G01R19/00;G01R31/3185;G01R31/04;H01L23/48;H01L25/065 |
主分类号 |
G01R19/00 |
代理机构 |
William Park & Associates Ltd. |
代理人 |
William Park & Associates Ltd. |
主权项 |
1. A test circuit comprising:
a test control unit configured to generate a pulse of a first test control signal and then generate pulses of first and second test control signals; a voltage applying section configured to apply a first voltage to a through via, that electrically connects a first chip and a second chip, in response to the first test control signal and apply a second voltage to the through via in response to the first and second test control signals; and a current sink section configured to sink current flowing through the through via with a first current sink capability in response to the first test control signal and sink current flowing through the through via with a second current sink capability in response to the first and second test control signals. |
地址 |
Icheon-Si KR |