发明名称 Test circuit and semiconductor apparatus including the same
摘要 A test circuit includes a through via test unit configured to be set to a first resistance value in response to a first test control signal and to a second resistance value in response to the first test control signal and a second test control signal, and form a current path including a through via that electrically connects a first chip and a second chip; and a test measurement unit configured to supply a test voltage to the through via and measure a current flowing through the through via.
申请公布号 US9465058(B2) 申请公布日期 2016.10.11
申请号 US201514867188 申请日期 2015.09.28
申请人 SK HYNIX INC. 发明人 Lee Dong Uk;Kim Young Ju
分类号 G01R19/00;G01R31/3185;G01R31/04;H01L23/48;H01L25/065 主分类号 G01R19/00
代理机构 William Park & Associates Ltd. 代理人 William Park & Associates Ltd.
主权项 1. A test circuit comprising: a test control unit configured to generate a pulse of a first test control signal and then generate pulses of first and second test control signals; a voltage applying section configured to apply a first voltage to a through via, that electrically connects a first chip and a second chip, in response to the first test control signal and apply a second voltage to the through via in response to the first and second test control signals; and a current sink section configured to sink current flowing through the through via with a first current sink capability in response to the first test control signal and sink current flowing through the through via with a second current sink capability in response to the first and second test control signals.
地址 Icheon-Si KR