| 摘要 |
An electrostatic capacitance sensor (10) includes a movable electrode (110), a support (120), a beam member (130), fixed electrodes (141) an (180), a detection unit (200), and a correction unit (300). The beam member (130) functions as a spring, by which the movable electrode (110) is fixed to the support (120) in a movable state. The detection unit (200) detects a change in capacitance charged between the movable electrode (110) and the fixed electrodes (141) and (180). The correction unit (300) corrects a detection result of the detection unit (200) and generates an acceleration signal that indicates acceleration. |
