METHODS AND SYSTEMS FOR APPLYING RUN-TO-RUN CONTROL AND VIRTUAL METROLOGY TO REDUCE EQUIPMENT RECOVERY TIME

摘要

Described herein are methods, apparatuses, and systems for reducing equipment repair time. In one embodiment, a computer implemented method includes collecting, with a system, data including test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility and determining, with the system, a relationship between tool parameter settings for the at least one manufacturing tool and at least some collected data including the test substrate data. The method further includes utilizing zero or more virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool based on the test substrate data and obtain at least one tool parameter adjustment for at least one target parameter for the at least one manufacturing tool. Applying multivariate run-to-run (R2R) control modeling to obtain tool parameter adjustments for at least one manufacturing tool occurs after maintenance to reduce maintenance recovery time and to reduce requalification time.

主权项

1. A computer implemented method comprising:
collecting, with a system, data including test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility; determining, with the system, a relationship between tool parameter settings for the at least one manufacturing tool and at least some collected data including the test substrate data; utilizing zero or more virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction; and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool based on the test substrate data and obtain at least one tool parameter adjustment for at least one target parameter for the at least one manufacturing tool, wherein applying multivariate run-to-run (R2R) control modeling to obtain tool parameter adjustments for at least one manufacturing tool occurs after maintenance to reduce maintenance recovery time and to reduce requalification time.