MANUFACTURING METHOD OF POLISHING PAD

摘要

PROBLEM TO BE SOLVED: To provide a method to manufacture a polishing pad superior in flattening characteristics, capable of restraining growth of scratches, high in polishing speed and furnished with a positive ray easily and favorably in productivity.

SOLUTION: This manufacturing method of the polishing pad includes a process to manufacture a laminated sheet by laminating a resin layer on one side of a tin sheet having at least one protruded part for connection of the positive ray, a process to form a large number of through-holes A passing through the tin sheet and the resin sheet on a part except for the protruded part for connection of the positive ray of the laminated sheet and a process to connect the positive ray to the protruded part for connection of the positive ray of the tin sheet.

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