发明名称 |
Temperature sensor calibration device and method. |
摘要 |
<p>A device and method for calibrating at least one temperature sensor is disclosed herein. A wafer (30) is provided having a first plurality of calibration elements or islands (36) of a material having a melting point in the range 150 DEG - 1150 DEG C. The effective reflectivity of the wafer is measured in operation using the temperature sensor or via a separate light source. A first step change in an output signal of the temperature sensor corresponding to a wafer temperature equal to the melting point of the first calibration islands is detected. Finally, the temperature sensor calibration parameters are calculated. Other devices, systems and methods are also disclosed. <IMAGE></p> |
申请公布号 |
EP0583007(A1) |
申请公布日期 |
1994.02.16 |
申请号 |
EP19930112878 |
申请日期 |
1993.08.11 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
MOSLEHI, MEHRDAD M.;NAJM , HABIB;VELO, LINO A. |
分类号 |
G01K15/00;G01J5/00;G01J5/52;H01L21/26;H01L21/324;H01L21/66;(IPC1-7):G01J5/00 |
主分类号 |
G01K15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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