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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要
申请公布号
JPH1131850(A)
申请公布日期
1999.02.02
申请号
JP19970185197
申请日期
1997.07.10
申请人
NEC CORP
发明人
CHIBA KAZUHIRO
分类号
G01J1/02;G01J5/02;G01J5/20;H01L21/027;H01L37/00;(IPC1-7):H01L37/00
主分类号
G01J1/02
代理机构
代理人
主权项
地址
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