| 摘要 |
PROBLEM TO BE SOLVED: To properly set the detaching position of a vessel by providing a rotary port having an opening communicating with the grooves of first and second fixed ports at the ends of the grooves, separating two adjacent rotary ports so as not to communicate with each other by the groove of one fixed port, and connecting the fixed ports to an air pressure source. SOLUTION: First and second fixed ports 15a1, 15a2 circumferentially have grooves 15b1, 15b2 on the respective seal surfaces. A rotary port 14a has a groove-like opening 14b communicating with the groove 15b1 of the first fixed port 15a1 and the groove 15b2 of the second fixed port 15a2 at the ends of the grooves 15b1, 15b2. Two adjacent rotary ports 14a are separated so as not to communicate with each other by the groove 15b1 (or 15b2) of one fixed port 15a1 (or 15a2). The fixed ports 15a1, 15a2 are connected to an air pressure source through a piping and a vacuum header. The rotary port 14a described in a position B shows that the rotary port 14a located in a position A is moved to the position B.
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