A METHOD FOR ETCHING A SUBSTRATE,申请号EP19990954133-传众专利搜索

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发明名称	A METHOD FOR ETCHING A SUBSTRATE
摘要
申请公布号	EP1131847(A1)	申请公布日期	2001.09.12
申请号	EP19990954133	申请日期	1999.11.03
申请人	SURFACE TECHNOLOGY SYSTEMS PLC	发明人	BHARDWAJ, JYOTI, KIRON;ASHRAF, HUMA;HOPKINS, JANET;LEA, LESLIE, MICHAEL;HYNES, ALAN, MICHAEL;JOHNSTON, IAN, RONALD
分类号	H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/321	主分类号	H01L21/302
代理机构		代理人
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