METHOD FOR PRODUCING CERIUM-BASED POLISH AND CERIUM- BASED POLISH

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a cerium-based polish even if it contains no F, having high polishing rate and good at polishing accuracy, and to provide a cerium-based polish. SOLUTION: This method for producing a cerium-based polish comprises mixing a cerium-based rare earth carbonate and/or a cerium-based rare earth oxide with an alkali metal salt and/or an alkaline earth metal salt and baking the resultant, and the cerium-based polish thus obtained contains an alkali metal and/or an alkaline earth metal and <=0.5 wt.% F.