发明名称 Thin film transistor having high mobility and high on-current and method for manufacturing the same
摘要 In a thin film transistor (TFT) including an insulating substrate and a polycrystalline silicon island formed on the insulating layer, a grain size of the polycrystalline silicon island is elongated along one direction. A source region, a channel region and a drain region are arranged in the polycrystalline silicon island in parallel with the direction.
申请公布号 US2004185641(A1) 申请公布日期 2004.09.23
申请号 US20040815393 申请日期 2004.04.01
申请人 发明人 TANABE HIROSHI;HAGA HIROSHI
分类号 H01L21/336;H01L29/49;H01L29/786;(IPC1-7):H01L21/36 主分类号 H01L21/336
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