| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor improved in detection accuracy by suppressing misdetections, in the detection of acceleration. <P>SOLUTION: A detection element 1 includes a first detecting element 1a, and a second detecting element 1b and a third detecting element 1c, opposed to one another across the first detecting element 1a which surround the element 1a, and the detecting elements including first to fourth counter electrodes 14a, 16a, 18a, 20a disposed thereon with shifting so as not to be partially opposed to each other in the X-axial direction and having a square X-axial sectional shape and an irregular Y-axial sectional shape. An acceleration detection part detects acceleration, based on the capacitance change between the first and the second detecting elements 1a and 1b and a capacitance change of the counter electrodes of the first and the third detecting elements 1a and 1c. <P>COPYRIGHT: (C)2010,JPO&INPIT |
