| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator which can secure high reliability and has small variance in characteristics. SOLUTION: The piezoelectric vibrator comprises a base substrate 1, a lower electrode 2 provided on the base substrate 1, a dielectric layer 3 provided on the lower electrode 2, an upper electrode 4 provided on the dielectric layer 3 and having its end extended onto the base substrate 1 without overlapping with the lower electrode 2, substrate electrodes 6 and 7 provided on the base substrate 1 and connected to the upper electrode 4, an insulating layer 5 provided covering the dielectric layer 3 and upper electrode 4, a connection electrode 8 provided on the insulating layer 5 and made of conductive resin, and a piezoelectric vibrating element 9 provided on the connection electrode 8 across a conductive adhesive 10. The connection electrode 8 is not in contact with the piezoelectric vibrating element 9 and electrically connected to the upper electrode 4 through the substrate electrodes 6 and 7. COPYRIGHT: (C)2007,JPO&INPIT
|
