发明名称 Positive resist composition and pattern forming method using the same
摘要 <p>A positive resist composition, includes: (A) a resin having a repeating unit represented by formula (A) as defined in the specification, which decomposes under an action of an acid to increase a solubility of the resin (A) in an alkali developer; and a pattern forming method uses the composition.</p>
申请公布号 EP1967904(A1) 申请公布日期 2008.09.10
申请号 EP20080004068 申请日期 2008.03.05
申请人 FUJIFILM CORPORATION 发明人 MIZUTANI, KAZUYOSHI
分类号 G03F7/004;G03F7/039 主分类号 G03F7/004
代理机构 代理人
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