| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a proximity scanning apparatus for highly accurately performing exposure by controlling illuminance of each light source in a plurality of radiation parts in sameness, and to provide its illuminance control method. <P>SOLUTION: The proximity scanning apparatus 1 includes: a substrate conveying mechanism 10 for conveying substrates W in an X direction; a plurality of mask holding parts 11 arranged in zigzag along a Y direction by holding a plurality of masks M formed with patterns respectively; the plurality of the radiation parts 14 radiating exposure light by being arranged on the upper parts of the plurality of the mask holding parts respectively; a plurality of first illuminance sensors 41 arranged above the respective mask holding parts 11 for detecting the illuminance of the exposure light EL in the radiation parts 14 by being arranged in the plurality of the radiation parts 14 respectively; and a second illuminance sensor 42 for detecting the illuminance of each exposure light EL, capable of moving to each position being radiated by each exposure light EL from the plurality of the radiation parts 14. <P>COPYRIGHT: (C)2009,JPO&INPIT |
