SYSTEM FOR PROCESSING OBJECT, METHOD OF PROCESSING OBJECT, DEVICE FOR EXPOSURE, METHOD OF EXPOSURE AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To maintain productivity even when an unexpected contingency happens.

SOLUTION: The system for processing an object includes a first processing device 50 adapted for performing a first processing on an object W, and a second processing device 10 adapted for performing a second processing on the object W supplied after the first processing. The system for processing an object further includes: a communication device CS which connects the first processing device 50 and the second processing device 10 so that the second processing device 10 may receive information concerning the first processing and a controller 120 enabling the second processing device 10 to switch over to a third processing different from the second processing for third processing execution when information concerning the outage of an object W is notified from the first processing device 50 by way of the communication device CS.

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