发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device having large current capacity, and to provide a manufacturing method thereof. <P>SOLUTION: The semiconductor device has an epitaxial wafer 110, an insulating film, a first electrode, a conductive layer, and a second electrode 160. The epitaxial wafer 110 includes a high defect region 111 and a low defect region 112 having lower defect density than the high defect region 111, and has a main surface 113 and a backside 114 on the opposite side from the main surface 113. The insulating film is formed covering the high defect region 111 on the main surface 113 of the epitaxial wafer 110. The first electrode is formed over the low defect region and adjacent thereto with the insulating film interposed. The conductive layer electrically connects the first electrode adjacent thereto with the insulating film interposed. The second electrode 160 is formed on the backside 114 of the epitaxial wafer 110. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009004566(A) 申请公布日期 2009.01.08
申请号 JP20070164002 申请日期 2007.06.21
申请人 SUMITOMO ELECTRIC IND LTD 发明人 FUJIKAWA KAZUHIRO
分类号 H01L29/47;H01L21/28;H01L21/336;H01L21/337;H01L29/06;H01L29/12;H01L29/739;H01L29/74;H01L29/78;H01L29/80;H01L29/808;H01L29/861;H01L29/872 主分类号 H01L29/47
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