| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate holding device capable of performing stable measurement simply. <P>SOLUTION: This substrate holding device comprises a place-on stand 12 on which the end of a sample 50 is placed, first and second attraction parts 13a, 13b which are provided to the place-on stand 12 and attract the sample 50, and an attraction stand 18 which is movably provided to the lower side of the sample 50 and has a jet port 46 jetting gas to the sample 50, and the device comprises switch parts 15a, 15b for switching ON/OFF of the first and second attraction parts 13a, 13b. The switch parts 15a, 15b turn on one of the first and second attraction parts 13a, 13b and turn off the other according to the position of the attraction stand 18 in relation to the sample 50. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
