| 摘要 |
<P>PROBLEM TO BE SOLVED: To acquire a furthermore similar value to a true value, when calculating a pattern size or edge irregularities (edge roughness) calculated from a pattern image having a noise. <P>SOLUTION: In a belt-like domain showing an edge periphery in an image, image processing parameter dependency on an edge position of a narrow part/wide part or image processing parameter dependency on an edge point position where the edge point exists on the outside part/inside part of a line is calculated, and thereby an image processing condition by which a measured value becomes sufficiently similar to the true value is calculated, or the true value is estimated. <P>COPYRIGHT: (C)2009,JPO&INPIT |
