| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface machining method of a surface plate for a polishing machine by which the surface of the surface plate can be finish-machined into a precise face having a desired rugged shape without requiring artisanal skill including experiential elements, and without preparing an exclusive machine even when the surface plate for the polishing machine being a machining object has a large diameter, and by which washing after machining is facilitated.SOLUTION: A surface machining method of a surface plate for a polishing machine includes a step of, by using a surface grinding machine 10 with a rotary grinding wheel 12 movable in two axial directions, that is, longitudinal and lateral directions, performing precise shape machining on the surface plate 2 for the polishing machine being a machining object fixed to a rotating table 11 by moving the grinding wheel 12 by the combination of the two axial directions, monitoring a moving amount of the grinding wheel 12 during the shape precise machining, and finishing the surface of the surface plate 2 for the polishing machine into the precise face having the desired rugged shape. |
