发明名称 分極反転素子の製造方法、導波路型波長変換素子の製造方法および導波路型波長変換素子
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a polarization reversal element capable of controlling a width of a polarization reversal area with high accuracy, a manufacturing method of a waveguide type wavelength conversion element, and the waveguide type wavelength conversion element.SOLUTION: A manufacturing method of a polarization reversal element includes the steps of: forming a comb electrode 2 on one surface 1a of a ferroelectric crystal substrate 1; forming an ion conductive oxide film 3 on another surface 1b facing the one surface 1a of the ferroelectric crystal substrate 1; forming a plane electrode 4 on the ion conductive oxide film 3; and forming a plurality of polarization reversal areas 5 from the one surface 1a to the other surface 1b on a part of the ferroelectric crystal substrate 1 directly below the comb electrode 2 by applying voltage between the comb electrode 2 and the plane electrode 4 via the ion conductive oxide film 3.
申请公布号 JP5984498(B2) 申请公布日期 2016.09.06
申请号 JP20120109656 申请日期 2012.05.11
申请人 三菱電機株式会社 发明人 曽田 真之介;吉田 幸久
分类号 G02F1/377 主分类号 G02F1/377
代理机构 代理人
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