发明名称 RESIN COMPOSITION FOR FORMING UNDERLAYER FILM, KIT FOR FORMING IMPRINT, LAMINATE, PATTERN FORMING METHOD AND METHOD FOR MANUFACTURING DEVICE
摘要 Provided are: a resin composition for forming an underlayer film, which is capable of forming an underlayer film having good surface properties and good adhesion to a base; a kit for forming an imprint; a laminate; a pattern forming method; and a method for manufacturing a device. A resin composition for forming an underlayer film, which contains a resin, a nucleophilic catalyst and a solvent, and wherein the content of the nucleophilic catalyst is 0.01-3% by mass relative to the solid content of the resin composition for forming an underlayer film.
申请公布号 WO2016148095(A1) 申请公布日期 2016.09.22
申请号 WO2016JP57903 申请日期 2016.03.14
申请人 FUJIFILM CORPORATION 发明人 OOMATSU Tadashi;KITAGAWA Hirotaka;GOTO Yuichiro
分类号 C09D201/00;B29C59/02;C08F8/00;C08F299/00;C09D5/00;C09D7/12;G11B5/84;H01L21/027 主分类号 C09D201/00
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