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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08321516(A)
申请公布日期
1996.12.03
申请号
JP19950128616
申请日期
1995.05.26
申请人
JAPAN RADIO CO LTD
发明人
TANIGUCHI TORU
分类号
H01L21/266;H01L21/338;H01L27/095;H01L29/812;(IPC1-7):H01L21/338
主分类号
H01L21/266
代理机构
代理人
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地址
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